Schneeberger Ultra-High Precision XYR 3-Axis Wafer Inspection Platform with Vacuum System and Renishaw RLE20

Description

Introducing the Schneeberger Ultra-High Precision XYR 3-Axis Wafer Inspection Platform, a cutting-edge solution designed for the demanding requirements of semiconductor manufacturing and wafer inspection. This platform incorporates advanced linear motor technology for smooth and efficient operation, ensuring precise control and accuracy. The 12-inch vacuum version wafer chuck provides a stable and secure platform for wafers, minimizing vibration and ensuring consistent results. Equipped with the Renishaw RLE20 closed-loop measurement system, this platform achieves unparalleled measurement accuracy and repeatability of 10nm, setting a new standard for precision in the industry. The inclusion of a vacuum system further enhances its capabilities, allowing for precise wafer handling and positioning. Built to last, this platform is constructed with high-quality materials and components, guaranteeing long-term reliability and performance. Experience the future of wafer inspection with the Schneeberger Ultra-High Precision XYR 3-Axis Wafer Inspection Platform.